Highly corrected close-packed microlens arrays and moth-eye structuring on curved surfaces

Abstract

The fabrication of near-micrometer-sized close-packed coherent microlens arrays on spheric or aspheric surfaces has been accomplished by use of a compact holographic projector system that was developed for producing multimicrometer down to submicrometer grid patterning on curved surfaces. The microlens arrays, which can be utilized as moth-eye relief structures, are formed in a photoimageable bisbenzocyclobutene polymeric resin by a photolytic process involving standing-wave interference patterns from the holographic projector system. Because of absorption, each integral microlenslet of the finished arrays possesses a near-paraboloid contour. The trajectories of the meridional rays from each microlenslet can be optimized to intersect at either a single point or a locus of points.