Monitoring of HF and F2 using a field-effect sensor
- 31 March 1995
- journal article
- Published by Elsevier BV in Sensors and Actuators B: Chemical
- Vol. 24 (1-3), 194-196
- https://doi.org/10.1016/0925-4005(95)85041-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A low-temperature oxygen sensor based on the Si/LaF3/Pt capacitive structureSensors and Actuators B: Chemical, 1992