A novel technique for die-level post-processing of released optical MEMS
- 13 April 2016
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- An Electrostatically Operated Torsion Mirror For Optical Switching DevicePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Micromachining for optical and optoelectronic systemsProceedings of the IEEE, 1997