Chemical Vapor Deposition of Polycrystalline Al2O3
- 1 November 1970
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 53 (11), 617-621
- https://doi.org/10.1111/j.1151-2916.1970.tb15985.x
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Deposition and Properties of Aluminum Oxide Obtained by Pyrolytic Decomposition of an Aluminum AlkoxideJournal of the Electrochemical Society, 1967
- Formation of Alumina Coatings on Beryllia By a Vapor Deposition ProcessPublished by Office of Scientific and Technical Information (OSTI) ,1961