Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength
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- 6 June 2005
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 14 (3), 590-597
- https://doi.org/10.1109/jmems.2005.844746
Abstract
An issue in microfabrication of the fluidic channels in glass/poly (dimethyl siloxane) (PDMS) is the absence of a well-defined study of the bonding strength between the surfaces making up these channels. Although most of the research papers mention the use of oxygen plasma for developing chemical (siloxane) bonds between the participating surfaces, yet they only define a certain set of parameters, tailored to a specific setup. An important requirement of all the microfluidics/biosensors industry is the development of a general regime, which defines a systematic method of gauging the bond strength between the participating surfaces in advance by correlation to a common parameter. This enhances the reliability of the devices and also gives a structured approach to its future large-scale manufacturing. In this paper, we explore the possibility of the existence of a common scale, which can be used to gauge bond strength between various surfaces. We find that the changes in wettability of surfaces owing to various levels of plasma exposure can be a useful parameter to gauge the bond strength. We obtained a good correlation between contact angle of deionized water (a direct measure of wettability) on the PDMS and glass surfaces based on various dosages or oxygen plasma treatment. The exposure was done first in an inductively coupled high-density (ICP) plasma system and then in plasma enhanced chemical vapor deposition (PECVD) system. This was followed by the measurement of bond strength by use or the standardized blister test.Keywords
This publication has 17 references indexed in Scilit:
- A two-stage discrete peristaltic micropumpSensors and Actuators A: Physical, 2003
- One-End Immobilization of Individual DNA Molecules on a Functional Hydrophobic Glass SurfaceJournal of Biomolecular Structure and Dynamics, 2002
- Low-k organosilicate films prepared by tetravinyltetramethylcyclotetrasiloxaneJournal of Applied Physics, 2002
- Polymer-Based Packaging Platform for Hybrid Microfluidic SystemsBiomedical Microdevices, 2002
- Characterization of SiO2 surface treatments using AFM, contact angles and a novel dewpoint techniqueColloids and Surfaces A: Physicochemical and Engineering Aspects, 1999
- Hydrophobicity recovery of polydimethylsiloxane after exposure to corona dischargesPolymer, 1998
- Control of high-density plasma sources for CVD and etchingVacuum, 1997
- Correlation Between Surface Free Energy and Surface ConstitutionScience, 1992
- On the aging of oxygen plasma-treated polydimethylsiloxane surfacesJournal of Colloid and Interface Science, 1990
- Analysis of Critical Debonding Pressures of Stressed Thin Films in the Blister TestThe Journal of Adhesion, 1988