Multiple harmonic compensation of Langmuir probes in rf discharges
- 1 May 2000
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 11 (5), 554-559
- https://doi.org/10.1088/0957-0233/11/5/316
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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