Low temperature aluminum doped zinc oxide thin film deposition on ultra‐thin flexible glass and PET substrates by RF magnetron sputtering
- 19 October 2015
- journal article
- review article
- Published by Wiley in physica status solidi (c)
- Vol. 12 (9-11), 1215-1219
- https://doi.org/10.1002/pssc.201510144