Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer
- 31 May 1999
- journal article
- Published by Elsevier BV in Vacuum
- Vol. 53 (1-2), 21-24
- https://doi.org/10.1016/s0042-207x(98)00414-x
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology