Impact of the Cu-based substrates and catalyst deposition techniques on carbon nanotube growth at low temperature by PECVD
- 30 November 2007
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 84 (11), 2501-2505
- https://doi.org/10.1016/j.mee.2007.05.024
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Preconcentration of Volatile Organics on Self-Assembled, Carbon Nanotubes in a MicrotrapAnalytical Chemistry, 2005
- Ballistic Transport in Metallic Nanotubes with Reliable Pd Ohmic ContactsNano Letters, 2003
- Extreme Oxygen Sensitivity of Electronic Properties of Carbon NanotubesScience, 2000
- Strength and Breaking Mechanism of Multiwalled Carbon Nanotubes Under Tensile LoadScience, 2000
- Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor depositionApplied Physics Letters, 1999
- Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission PropertiesScience, 1999
- A nanotube-based field-emission flat panel displayApplied Physics Letters, 1998
- Nanotubes as nanoprobes in scanning probe microscopyNature, 1996
- Exceptionally high Young's modulus observed for individual carbon nanotubesNature, 1996
- Helical microtubules of graphitic carbonNature, 1991