Control of an MPACVD reactor for polycrystalline textured diamond films synthesis: role of microwave power density
- 30 April 1996
- journal article
- Published by Elsevier BV in Diamond and Related Materials
- Vol. 5 (3-5), 338-344
- https://doi.org/10.1016/0925-9635(95)00428-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Nitrogen stabilized 〈100〉 texture in chemical vapor deposited diamond filmsApplied Physics Letters, 1994
- Oriented CVD diamond films: twin formation, structure and morphologyDiamond and Related Materials, 1994
- Optical reflection and angle-resolved light scattering from textured polycrystalline diamond filmsDiamond and Related Materials, 1993
- Chemical vapour deposition and characterization of smooth {100}-faceted diamond filmsDiamond and Related Materials, 1993
- Diamond deposition in a bell-jar reactor: influence of the plasma and substrate parameters on the microstructure and growth rateDiamond and Related Materials, 1993
- Analysis of the composite structures in diamond thin films by Raman spectroscopyPhysical Review B, 1990