Optical functions of silicon at high temperatures

Abstract

The optical spectra of silicon are studied ellipsometrically at temperatures between 300 and 1200 K in the spectral range from 2 to 4.3 eV. We present a database of optical constants for pure and heavily doped samples, with the highest concentration of free carriers of 4×10 20 cm −3 . We cover the photon energy range between 0.2 and 2 eV by using an oscillator representation of the visible and ultraviolet ellipsometric data. We also report the results for the temperature dependence of the E 1 interband transition. The values of the energy shift and Lorentzian broadening of this spectral feature are obtained from analytical critical-point line shapes by fitting differentiated dielectric functions; alternatively, we apply the numerical convolution with Lorentzian contours to describe quantitatively the increased broadening with increasing temperature.