Single-crystal barium titanate thin films by ion slicing
- 27 January 2003
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 82 (4), 616-618
- https://doi.org/10.1063/1.1540727
Abstract
Thin barium titanate films, 0.5–8 μm thick, are obtained from a single-crystal bulk sample using ion slicing. The process, based on ion implantation and anodic bonding, separates thin films having areas of ∼1×1 cm 2 , from bulk crystals. The quality of the film is characterized by measurement of surface roughness and dielectric properties. The film permittivity retains its single-crystal value.Keywords
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