Diffusion of group III-, IV- and V-elements in SI under ion irradiation
- 1 April 1992
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 67 (1-4), 439-442
- https://doi.org/10.1016/0168-583x(92)95848-l
Abstract
No abstract availableKeywords
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