Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths
- 29 April 2013
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 102 (17), 171106
- https://doi.org/10.1063/1.4803541
Abstract
We present a method for detecting light in the 1550 nm wavelength window based on a silicon nitride waveguide that is vertically coupled to a silicon photonic crystal cavity. The absorption in silicon arises from deep-levels created by ion implantation, thereby providing excellent CMOS compatibility. We demonstrate a responsivity of 0.108 A/W at −10 V reverse bias with a dark current of 9.4 nA. Our work demonstrates one of the smallest wavelength selective photodectors realised to date. By cascading such detectors we also demonstrate a two-channel demultiplexer.Keywords
This publication has 19 references indexed in Scilit:
- Two-photon-absorption photodiodes in Si photonic-crystal slow-light waveguidesApplied Physics Letters, 2013
- Silicon sub-bandgap photon linear detection in two-photon experiments: A photo-assisted Shockley-Read-Hall mechanismApplied Physics Letters, 2013
- Highly efficient optical filter based on vertically coupled photonic crystal cavity and bus waveguideOptics Letters, 2013
- Photonic network-on-chip architectures using multilayer deposited silicon materials for high-performance chip multiprocessorsACM Journal on Emerging Technologies in Computing Systems, 2011
- Defect-Enhanced Silicon-on-Insulator Waveguide Resonant Photodetector With High Sensitivity at 1.55 $\mu$mIEEE Photonics Technology Letters, 2010
- All-silicon sub-Gb/s telecom detector with low dark current and high quantum efficiency on chipApplied Physics Letters, 2010
- 42 GHz pin Germanium photodetector integrated in a silicon-on-insulator waveguideOptics Express, 2009
- Silicon-on-insulator waveguide photodetector with self-ion-implantation-engineered-enhanced infrared responseJournal of Vacuum Science & Technology A, 2006
- Optical attenuation in defect-engineered silicon rib waveguidesJournal of Applied Physics, 2006
- Scattering-theory analysis of waveguide-resonator couplingPhysical Review E, 2000