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Polysilanes for semiconductor fabrication
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Polysilanes for semiconductor fabrication
Polysilanes for semiconductor fabrication
Shuzi Hayase
Shuzi Hayase
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22 October 2002
journal article
review article
Published by
Elsevier BV
in
Progress in Polymer Science
Vol. 28
(3)
,
359-381
https://doi.org/10.1016/s0079-6700(02)00034-5
Abstract
No abstract available
Keywords
POLYSILANE
LITHOGRAPHY
BILAYER
RESIST
ANTI-REFLECTION
PHOTO-REACTIVITY
AMPLIFICATION
ELECTRON TRANSFER
BENZOPHENONE
PATTERN TRANSFER
Cited by 60 articles