Optical characteristics of Si/SiO2 multilayers prepared by magnetron sputtering
- 30 November 2009
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 86 (11), 2342-2346
- https://doi.org/10.1016/j.mee.2009.04.014
Abstract
No abstract availableKeywords
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