The dependence of the sputtering ratio of polycrystalline metals on the angle of ion incidence on the target

Abstract

The sputtering ratio of polycrystalline metals as well as the amount of ion beam energy reflected from the target surface showed angular behavior which was not monotonic at large angles of incidence. The simple model which takes into account "close-packing" at the target surface and, consequently, more or less ordered shadowing of the surface atoms seems to describe the experimental results qualitatively.