CMOS-Based Tactile Microsensor for Medical Instrumentation
- 22 January 2007
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Sensors Journal
- Vol. 7 (2), 258-265
- https://doi.org/10.1109/jsen.2006.886902
Abstract
This paper presents a novel tactile sensing device aimed at a variety of medical instrumentation applications, including extravascular blood pressure monitoring, distinguishing a coronary artery from a nearby running cardiac vein, and locating the site of a coronary occlusion. The monolithically integrated microsensor is fabricated using an industrial CMOS process with a limited number of postmicromachining steps. Using the tonometric principle, an array of membrane capacitors can detect and monitor the pulsatile pressure variations inside a blood vesselKeywords
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