Sputtering of atoms during ion bombardment of media containing nanosized particles in the near-surface region
- 1 February 2015
- journal article
- Published by Pleiades Publishing Ltd in Technical Physics Letters
- Vol. 41 (2), 187-190
- https://doi.org/10.1134/s1063785015020224
Abstract
Modified mechanisms of linear cascades and shock waves have been considered for investigation of the sputtering of atoms during ion bombardment of a medium (matrix) containing nanosized particles of another material in the near-surface region. It is established that, in the case of linear cascades, allowance for the presence of interfaces between nanoparticles and the matrix can lead to both increase and decrease in the yield of sputtered products, while the shock wave mechanism always leads to an increase in the emission of particles.Keywords
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