Electron-beam-induced modification of stoichiometry and acceleration of titanium diffusion in Al2O3/Al/C structures

Abstract

The electron-beam-induced modification of stoichiometry and acceleration of titanium diffusion in Al₂O₃/Al/C structures have been studied for the first time using He⁴⁺ ion backscattering, scanning electron microscopy, and electron probe microanalysis techniques. It is established that the electron beam treatment leads to an increase in the effective diffusion coefficient of ion-implanted titanium, changes the ratio of aluminum and oxygen concentrations in the α-Al₂O₃ layer, and induces the substitution of carbon for oxygen in this layer.