Stainless steel-based integrated mass-flow controller for reactive and corrosive gases
- 1 April 2002
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 97-98, 33-38
- https://doi.org/10.1016/s0924-4247(01)00806-8
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology (10044112)
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