Glass-on-LiNbO3 heterostructure formed via a two-step plasma activated low-temperature direct bonding method
- 4 August 2018
- journal article
- research article
- Published by Elsevier BV in Applied Surface Science
- Vol. 459, 621-629
- https://doi.org/10.1016/j.apsusc.2018.08.031
Abstract
No abstract availableFunding Information
- National Natural Science Foundation of China (51505106, 51522503)
- China Postdoctoral Science Foundation (2017M610207)
- Heilongjiang Provincial Postdoctoral Science Foundation (LBH-Z16074)
This publication has 35 references indexed in Scilit:
- Polarization-dependent water adsorption on the LiNbO(0001) surfacePhysical Review B, 2012
- Atomic-resolution imaging of the polar (000) surface of LiNbOin aqueous solution by frequency modulation atomic force microscopyPhysical Review B, 2012
- UV epoxy bonding for enhanced SAW transmission and microscale acoustofluidic integrationLab on a Chip, 2012
- Effects of forming gas annealing on LiNbO3 single crystalsPhysica B: Condensed Matter, 2011
- Preparation of durable hydrophobic cellulose fabric from water glass and mixed organosilanesApplied Surface Science, 2010
- Plasma-activated direct bonding of diamond-on-insulator wafers to thermal oxide grown silicon wafersDiamond and Related Materials, 2010
- Void nucleation at a sequentially plasma-activated silicon/silicon bonded interfaceJournal of Micromechanics and Microengineering, 2010
- Influence of nitrogen microwave radicals on sequential plasma activated bondingMaterials Letters, 2010
- Room temperature bonding of silicon and lithium niobateApplied Physics Letters, 2006
- Integration of Single‐Crystal LiNbO3 Thin Film on Silicon by Laser Irradiation and Ion Implantation– Induced Layer TransferAdvanced Materials, 2006