Effect of native Al2O3 on the elastic response of nanoscale Al films
- 21 June 2002
- journal article
- Published by Elsevier BV in Acta Materialia
- Vol. 50 (11), 2779-2786
- https://doi.org/10.1016/s1359-6454(02)00089-7
Abstract
No abstract availableKeywords
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- Planarity of large MEMSJournal of Microelectromechanical Systems, 1996
- Tensile properties of aluminum/alumina multi-layered thin filmsJournal of Electronic Materials, 1993