Hysteresis in the E- to H-mode transition in a planar coil, inductively coupled rf argon discharge
- 7 November 1998
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 31 (21), 3082-3094
- https://doi.org/10.1088/0022-3727/31/21/014
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Theoretical and experimental investigations of the electromagnetic field within a planar coil, inductively coupled RF plasma sourcePlasma Sources Science and Technology, 1998
- Power transfer efficiency and mode jump in an inductive RF dischargePlasma Sources Science and Technology, 1998
- Measurement of the induced plasma current in a planar coil, low-frequency, RF induction plasma sourcePlasma Sources Science and Technology, 1997
- On the E - H mode transition in RF inductive dischargesJournal of Physics D: Applied Physics, 1996
- Electron-density and energy distributions in a planar inductively coupled dischargeJournal of Applied Physics, 1994
- High-density plasma mode of an inductively coupled radio frequency dischargeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Millimeter-wave interferometer for measuring plasma electron densityReview of Scientific Instruments, 1988
- The transition from the first to the second stage of the ring dischargeJournal of Physics D: Applied Physics, 1978
- High-Frequency Fields in Solenoidal CoilsJournal of Applied Physics, 1969
- The Electrodeless Discharge in Mercury VaporPhysical Review B, 1931