Comparison of diamondlike coatings deposited with C+ and various hydrocarbon ion beams
- 19 January 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (3), 132-134
- https://doi.org/10.1063/1.97693
Abstract
The mechanical properties of the diamondlike coatings deposited with mass‐separated C+, CH+3, CH+4, and C2H+2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.Keywords
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