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Radiation Annealing of Boron-Implanted Silicon with a Halogen Lamp
Home
Publications
Radiation Annealing of Boron-Implanted Silicon with a Halogen Lamp
Radiation Annealing of Boron-Implanted Silicon with a Halogen Lamp
KN
Kazuo Nishiyama
Kazuo Nishiyama
MA
Michio Arai
Michio Arai
NW
Naozo Watanabe
Naozo Watanabe
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1 October 1980
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 19
(10)
,
L563-L566
https://doi.org/10.1143/jjap.19.l563
Abstract
No abstract available
Cited by 99 articles