Fabrication of MgB2Nanowire Single-Photon Detector with Meander Structure
- 1 February 2013
- journal article
- Published by IOP Publishing in Applied Physics Express
- Vol. 6 (2), 023101
- https://doi.org/10.7567/apex.6.023101
Abstract
We report the fabrication of a MgB2 nanowire single-photon detector (SSPD or SNSPD) with a meander structure and its optical response. In-situ passivation of AlN is quite effective for both protecting the MgB2 surface from oxidation and from damage during the Ar ion milling process. Meander patterns of 10×10 µm2 with the line widths between 225 to 135 nm are obtained without degradation. The meander with the line width of 135 nm exhibits the capacity for detecting single photons at λ= 1550 nm.Keywords
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