P2.0.14 Deposition of nanocrystalline WO3 thin film using magnetron sputtered multilayer structure in view of gas sensor applications
- 1 January 2012
- conference paper
- conference paper
- Published by AMA Service GmbH
- p. 1305-1307
- https://doi.org/10.5162/imcs2012/p2.0.14