Multicomponent particle formation via gas-phase reactions of single-component precursors
- 31 December 1992
- journal article
- Published by Elsevier BV in Journal of Aerosol Science
- Vol. 23, 249-252
- https://doi.org/10.1016/0021-8502(92)90396-d
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Preparation and Properties of Aluminum Nitride Films Using an Organometallic PrecursorJournal of the Electrochemical Society, 1989
- Summary Abstract: Characterization of AlN films produced by chemical vapor deposition using a novel metal azide precursorJournal of Vacuum Science & Technology A, 1988