A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz
- 25 August 2005
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 384-387
- https://doi.org/10.1109/sensor.1995.721827
Abstract
No abstract availableKeywords
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