All Niobium Nitride Josephson Junction with Hydrogenated Amorphous Silicon Barrier and its Application to the Logic Circuit
- 1 December 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (12A), L916
- https://doi.org/10.1143/jjap.23.l916
Abstract
Josephson tunnel junctions with all niobium nitride (NbN) electrodes were fabricated with sputtered amorphous silicon (a-Si:H) films as tunnel barriers whose surfaces are oxidized by an rf-plasma oxidation. The specific capacitance of the fabricated junction strongly decreased with increase in the thickness of the a-Si:H film. The specific capacitance of less than 4 µF/cm2 was obtained for the a-Si:H thickness of about 2 nm. A logic circuit composed of four-junction logic (4JL) gates was fabricated using these junctions and was operated with the minimum logic delay of 9 ps/gate.Keywords
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