Above 700 V superjunction MOSFETs fabricated by deep trench etching and epitaxial growth

Publisher Website

1 August 2010

journal article
Published by IOP Publishing in Journal of Semiconductors

Vol. 31 (8)
https://doi.org/10.1088/1674-4926/31/8/084002

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Low-voltage superjunction technology
IET Circuits, Devices & Systems, 2007
Theory of Semiconductor Superjunction Devices
Japanese Journal of Applied Physics, 1997

Cited by 14 articles