Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials
- 31 May 1998
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 103-104, 268-275
- https://doi.org/10.1016/s0257-8972(98)00422-8
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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