Microscope Projection Photolithography for Rapid Prototyping of Masters with Micron-Scale Features for Use in Soft Lithography
- 24 August 2001
- journal article
- research article
- Published by American Chemical Society (ACS) in Langmuir
- Vol. 17 (19), 6005-6012
- https://doi.org/10.1021/la010655t
Abstract
No abstract availableKeywords
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