Electrostatic effects in micromachined actuators for adaptive optics

Open Access

Publisher Website

31 October 1997

journal article
Published by Elsevier BV in Journal of Electrostatics

Vol. 42 (1-2), 69-81
https://doi.org/10.1016/s0304-3886(97)00138-1

Abstract

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Keywords

Cited by 21 articles