Electron heating mechanisms in helium rf glow discharges: A self-consistent kinetic calculation

Abstract

Power dissipation mechanisms in low-pressure helium radio-frequency glow discharges are studied using a model which is able to describe the discharge at the kinetic level with a self-consistent electric field. We find a low average electron energy ( eV) in the bulk plasma and a weak electric field (≊2 V/cm) that is largely out of phase with the sheath fields. The weak bulk field is shown to be important for heating electrons of all energies.