Thermodynamic stability of binary oxides in contact with silicon

Abstract

Using tabulated thermodynamic data, a comprehensive investigation of the thermo-dynamic stability of binary oxides in contact with silicon at 1000 K was conducted. Reactions between silicon and each binary oxide at 1000 K, including those involving ternary phases, were considered. Sufficient data exist to conclude that all binary oxides except the following are thermodynamically unstable in contact with silicon at 1000 K: Li₂O, most of the alkaline earth oxides (BeO, MgO, CaO, and SrO), the column IIIB oxides (Sc₂O₃, Y₂O₃, and Re₂O₃, where Re is a rare earth), ThO₂, UO₂, ZrO₂, HfO₂, and Al₂O₃. Of these remaining oxides, sufficient data exist to conclude that BeO, MgO, and ZrO₂ are thermodynamically stable in contact with silicon at 1000 K. Our results are consistent with reported investigations of silicon/binary oxide interfaces and identify candidate materials for future investigations.