Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates
- 1 November 2006
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 24 (6), 2993-2997
- https://doi.org/10.1116/1.2363409
Abstract
In this work, antiwear nanoimprint templates were made by depositing and patterning diamondlike carbon (DLC) films on Si and quartz. A capacitively coupled plasma enhanced chemical vapor deposition (PECVD) system was configured to deposit thick DLC films on Si and quartz substrates. These films were characterized with Raman spectroscopy, electron energy loss spectroscopy, atomic force microscopy, nanoindentation, contact angle measurements, and optical transmission measurements. The rf power and pressure of the PECVD process were varied to obtain uniform coating of DLC films with smooth surface ( rms), low surface energy , and high hardness . The resulting films’ wear resistance is more than three times better than quartz. The DLC films were patterned by nanoimprint lithography using polymethylmethacrylate (PMMA) followed by plasma etch. Thermal nanoimprint tests with DLC templates were performed in PMMA. Atomic force microscopy measurements indicated excellent pattern-transfer fidelity and template-polymer separation.
Keywords
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