Stresses and deformation processes in thin films on substrates
- 1 January 1988
- journal article
- research article
- Published by Informa UK Limited in Critical Reviews in Solid State and Materials Sciences
- Vol. 14 (3), 225-268
- https://doi.org/10.1080/10408438808243734
Abstract
The stresses that develop in thin films on substrates can be detrimental to the reliability of thin film electronic devices. In order to design these devices for improved mechanical reliability, an understanding of the origin of these stresses and the controlling deformation processes in thin films is needed. This review begins with a discussion of the basic techniques used for measuring stresses in thin films and for studying the mechanical properties of thin films. The proposed models for the origin of stresses in thin films are then reviewed. Finally, the effects of microstructure and substrate constraint on thin film deformation processes are discussed.Keywords
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