TOF ERD experiments using a 10 MeV 35Cl beam
- 1 February 1992
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 64 (1-4), 296-300
- https://doi.org/10.1016/0168-583x(92)95484-9
Abstract
An analysis system has been established for stoichiometry of thin layers composed of chemical elements which range from light elements to medium-heavy ones such as Fe. A beam of 10 MeV 35C1 was used to recoil nuclei from the target. The mass of recoils has been identified by a counter telescope which consists of two timing detectors for time of flight (TOF) and a surface barrier detector (SBD) for energy measurement of each particle. The detection efficiency of the TOF spectrometer was determined as a function of atomic number Z for light elements up to chlorine. Experimental results are reported for LiF/Si, BF2-implanted SiO2/Si and FeOv/C samples. Factors which affect the accuracy of the present method are discussed.Keywords
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