Atomic layer deposition for nanostructured Li-ion batteries
- 21 November 2011
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 30 (1), 010801
- https://doi.org/10.1116/1.3660699
Abstract
Nanostructuring is targeted as a solution to achieve the improvements required for implementing Li-ion batteries in a wide range of applications. These applications range in size from electrical vehicles down to microsystems. Atomic layer deposition (ALD) could be an enabling technology for nanostructured Li-ion batteries as it is capable of depositing ultrathin films (1–100 nm) in complex structures with precise growth control. The potential of ALD is reviewed for three battery concepts that can be distinguished, i.e., particle-based electrodes, 3D-structured electrodes, and 3D all-solid-state microbatteries. It is discussed that a large range of materials can be deposited by ALD and recent demonstrations of battery improvements by ALD are used to exemplify its large potential.Keywords
This publication has 61 references indexed in Scilit:
- Fe3O4 Nanoparticles Confined in Mesocellular Carbon Foam for High Performance Anode Materials for Lithium‐Ion BatteriesAdvanced Functional Materials, 2011
- Electrochemical effects of ALD surface modification on combustion synthesized LiNi1/3Mn1/3Co1/3O2 as a layered-cathode materialJournal of Power Sources, 2010
- Nano active materials for lithium-ion batteriesNanoscale, 2010
- Lanthanum titanate and lithium lanthanum titanate thin films grown by atomic layer depositionJournal of Materials Chemistry, 2010
- Thermodynamic measurements pertaining to the hysteretic intercalation of lithium in polymer-derived silicon oxycarbideJournal of Power Sources, 2010
- Surface modification of cathode materials from nano- to microscale for rechargeable lithium-ion batteriesJournal of Materials Chemistry, 2010
- Building better batteriesNature, 2008
- New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMsSolid-State Electronics, 2007
- Issue and challenges facing rechargeable thin film lithium batteriesMaterials Research Bulletin, 2007
- Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water processJournal of Applied Physics, 2005