Room temperature crystallization of indium tin oxide films on glass and polyethylene terephthalate substrates using rf plasma
- 1 July 2007
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 25 (4), 1052-1055
- https://doi.org/10.1116/1.2748807
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
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- 43.4: A 4-inch Reflective Color TFT-LCD Using a Plastic SubstrateSID Symposium Digest of Technical Papers, 2002
- Excimer laser crystallization and doping of silicon films on plastic substratesApplied Physics Letters, 1997