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Integration of ferroelectric thin films into nonvolatile memories
Home
Publications
Integration of ferroelectric thin films into nonvolatile memories
Integration of ferroelectric thin films into nonvolatile memories
SS
S. Sinharoy
S. Sinharoy
HB
H. Buhay
H. Buhay
DL
D. R. Lampe
D. R. Lampe
MF
M. H. Francombe
M. H. Francombe
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1 July 1992
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 10
(4)
,
1554-1561
https://doi.org/10.1116/1.578044
Abstract
No abstract available
Keywords
NONVOLATILE MEMORY
Cited by 105 articles