Influence of Oxygen Gas Ratio on the Properties of Aluminum-Doped Zinc Oxide Films Prepared by Radio Frequency Magnetron Sputtering
- 1 May 2016
- journal article
- Published by American Scientific Publishers in Journal of Nanoscience and Nanotechnology
- Vol. 16 (5), 5138-5142
- https://doi.org/10.1166/jnn.2016.12227