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Abstract
Photonic crystal nanobeam cavities are versatile platforms of interest for optical communications, optomechanics, optofluidics, cavity QED, etc. In a previous work [Appl. Phys. Lett. 96, 203102 (2010)], we proposed a deterministic method to achieve ultrahigh Q cavities. This follow-up work provides systematic analysis and verifications of the deterministic design recipe and further extends the discussion to air-mode cavities. We demonstrate designs of dielectric-mode and air-mode cavities with Q > 109, as well as dielectric-mode nanobeam cavities with both ultrahigh-Q (> 107) and ultrahigh on-resonance transmissions (T > 95%).