The effect of oxygen on magnetic properties and corrosion resistance of Fe–N thin films
- 15 April 1999
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 85 (8), 4571-4573
- https://doi.org/10.1063/1.370411
Abstract
The effect of oxygen and heat treatment on magnetic properties and corrosion resistance of Fe–N thin films sputter-deposited under various N 2 +O 2 partial pressure were investigated. All the as sputteredfilms have a single phase of α-Fe only, except where a high N 2 +O 2 partial pressure was used. After annealing at 200–500 °C, the structure and magnetic properties of Fe–N–O films were changed. Under suitable conditions the magnetic properties of Fe–N–O films were found to have H c of 0.5 Oe and 4πM s around 20 kG. It is also demonstrated that the oxygen has improved the corrosion resistance and thermal stability of Fe–N thin film.Keywords
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