Micromechanical testing of SU‐8 cantilevers
- 11 January 2005
- journal article
- Published by Wiley in Fatigue & Fracture of Engineering Materials & Structures
- Vol. 28 (8), 735-742
- https://doi.org/10.1111/j.1460-2695.2005.00873.x
Abstract
No abstract availableKeywords
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