Self-aligned micromachining process for large-scale, free-space optical cross-connects
- 1 December 2000
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 18 (12), 1785-1791
- https://doi.org/10.1109/50.908730
Abstract
A new micromachining process for large-scale optical cross-connects is presented. It satisfies the high-accuracy optical alignment required for free-space optics. A self-aligned batch-process allowing the simultaneous fabrication of vertical mirrors and fiber guides is performed with only one-mask. This process is based on bulk micromachining of [100] silicon. A first demonstration is performed on a 2/spl times/2 elementary cell then, it is extended to the fabrication of larger mirror arrays. Promising performances such as insertion loss lower than 0.5 dB, sub-millisecond switching time (0.3 ms) and reliable operation (more than 20 million cycles) are demonstrated on a bypass switch. An improved fabrication process, leading to an increase of integration density is also presented. It is based on the combination of deep dry-etching and anisotropic wet-etching.Keywords
This publication has 13 references indexed in Scilit:
- Micro-opto-mechanical devices fabricated by anisotropic etching of [110] siliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Self-aligned mirror and V-grooves in free-space micromachined optical switchesElectronics Letters, 2000
- Collective microoptics on fiber ribbon for optical interconnecting devicesJournal of Lightwave Technology, 1999
- Free-space fiber-optic switches based on MEMS vertical torsion mirrorsJournal of Lightwave Technology, 1999
- A fiber connectorized MEMS variable optical attenuatorIEEE Photonics Technology Letters, 1998
- Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnectsIEEE Photonics Technology Letters, 1998
- Surface-micromachined micro-XYZ stages for free-space microoptical benchIEEE Photonics Technology Letters, 1997
- Silicon anisotropic etching in KOH-isopropanol etchantSensors and Actuators A: Physical, 1995
- Fabrication of a magnetic transducer composed of a high-density array of microelectromagnets with on-chip electronicsSensors and Actuators A: Physical, 1994
- Micromachined optical planes and reflectors in siliconSensors and Actuators A: Physical, 1994