Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel
- 9 September 2010
- journal article
- research article
- Published by Elsevier BV in Precision Engineering
- Vol. 35 (1), 173-182
- https://doi.org/10.1016/j.precisioneng.2010.09.002
Abstract
No abstract availableKeywords
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