Energy loss near-edge structure for materials containing light elements by reflection electron energy loss spectroscopy

Abstract

A reflection electron energy loss spectroscopy system has been developed to investigate local surface atomic structures around light elements such as C, N, and O. Electrons scattered inelastically on a surface with a small scattering angle are energy analyzed. This system was used to measure energy loss near‐edge structures (ELNESs) for materials such as BN, graphite, and NiO. The comparison between ELNES and x‐ray absorption near edge structure suggests that the ELNES is useful for the atomic structure analyses of surfaces.